Metal Based Thin Films for Electronics

This up–to–date handbook covers the main topics of preparation, characterization and properties of complex metal–based layer systems. The authors discuss advanced methods for structure, chemical and electronic state characterization with reference to the properties of thin functional layers, such as metallization and barrier layers for microelectronics, magnetoresistive layers for GMR and TMR, sensor and resistance layers.
This second edition is completely revised and updated and complemented by a chapter on photovoltaic.

"Through its focus on practical aspects and its didactic approach, the book is designed especially for practitioners. It can be highly recommended to materials engineers, physicists or process engineers who work or plan to work in the still exciting field of micro electronics."
Vakuum in Forschung und Praxis

A perfect introduction to the field – for professionals and students."
Angewandte Chemie 11/2004


Klaus Wetzig is Director of the Leibniz Institute of Solid State and Materials Research, Dresden. His research interests include materials analysis and microstructures, especially electron microscopy of functional materials, characterization of thin films for electronics, and nanostructural features in general.

Claus Michael Schneider is Director at the Institute of Solid State Research of the Research Center Jülich (IFF–IEE). His research interests include solid state physics, thin film systems and surface magnetism as well as the physics of nanostructures.



– Thin Film Systems: Basic Aspects
– Thin Film Preparation and Characterization Techniques
– Thin Film Systems Characterization and Optimization
– Devices


Klaus Wetzig is Director of the Leibniz Institute of Solid State and Materials Research, Dresden. His research interests include materials analysis and microstructures, especially electron microscopy of functional materials, characterization of thin films for electronics, and nanostructural features in general.

Claus Michael Schneider is Director at the Institute of Solid State Research of the Research Center Jülich (IFF–IEE). His research interests include solid state physics, thin film systems and surface magnetism as well as the physics of nanostructures.


"...I can certainly agree with the final sentence of the book cover: A perfect introduction to the field–for professionals and students."
Angewandte Chemie 2004 No. 11, Uwe Bornscheuer

"Through its focus on practical aspects and its didactic approach, the book is designed especially for practitioners. It can be highly recommended to materials engineers, physicists or process engineers who work or plan to work in the still exciting field of micro electronics."
Winfried Blau, European Society of Thin Films, Dresden