Micro Process Engineering: Fundamentals, Devices, Fabrication, and Applications

Now available in softcover, this practical book offers topical content from AMN, the only book series on microsystems technology, for engineers as well as MSc and PhD students on MEMS courses. Comprehensive in its coverage, the book is divided into four sections: fundamentals, design and system integration, fabrication technologies and materials, and applications of microstructured devices and systems, with a common nomenclature throughout to aid orientation. The result is a deeper insight leading to a more sophisticated view of continuous flow processing in education, laboratory experiments, and chemical synthesis.

Process Engineering Methods and Microsystem Technology Momentum and Heat Transfer in Microsized Devices Transport Processes and Exchange Equipment Multiphase Flow, Evaporation, and Condensation at the Microscale Generation and Multiphase Flow of Emulsions in Microchannels Chemical Reactions in Continuous–flow Microstructured Reactors Design Process and Project Management Simulation and Analytical Modeling for Microreactor Design Integration of Sensors and Process–analytical Techniques Microfabrication in Metals and Polymers Silicon Microfabrication for Microfluidics Microfabrication in Ceramics and Glass Industrial Applications of Microchannel Process Technology in the United States Industrial Applications in Europe Industrial Production Plants in Japan and Future Developments Laboratory Applications of Microstructured Devices in Student Education