Cmos – Mems

This edition of ′CMOS–MEMS′ was originally published in the successful series ′Advanced Micro & Nanosystems′. Here, the combination of the globally established, billion dollar chip mass fabrication technology CMOS with the fascinating and commercially promising new world of MEMS is covered from all angles. The book introduces readers to this fi eld and takes them from fabrication technologies and material charaterization aspects to the actual applications of CMOS–MEMS – a wide range of miniaturized physical, chemical and biological sensors and RF systems. Vital knowledge on circuit and system integration issues concludes this in–depth treatise, illustrating the advantages of combining CMOS and MEMS in the first place, rather than having a hybrid solution.

Preface V Foreword IX List of Contributors XIII 1 Fabrication Technology 1 O. Brand 2 Material Characterization 69 J. O. Paul and P. Ruther 3 Monolithically Integrated Inertial Sensors 137 G. K. Fedder, J. Chae, H. Kulah, K. Najafi, T. Denison, J. Kuang, and S. Lewis 4 CMOS–MEMS Acoustic Devices 193 J. J. Neumann and K. J. Gabriel 5 RF CMOS MEMS 225 T. Mukherjee and G. K. Fedder 6 CMOS–based Pressure Sensors 257 H.–J. Timme 7 CMOS–based Chemical Sensors 335 A. Hierlemann 8 Biometric Capacitive CMOS Fingerprint Sensor Systems 391 C. Hierold, G. Hribernig, and T. Scheiter 9 CMOS–based Biochemical Sensing Systems 447 J. Lichtenberg, H. Baltes 10 CMOS–based Thermal Sensors 479 T. Akin 11 Circuit and System Integration 513 C. Hagleitner and K.–U. Kirstein Subject Index 579

Oliver Brand is Professor of Bioengineering and Microelectronics/Microsystems at Georgia Institute of Technology, Atlanta, USA. He received his diploma degree in Physics from Technical University Karlsruhe, Germany, in 1990, and his PhD from ETH Zurich, Switzerland, in 1994. Between 1995 and 2002, he held research and teaching positions at the Georgia Institute of Technology (1995–1997) and ETH Zurich (1997–2002). Oliver Brand′s research interest is in the areas of CMOS–based micro– and nanosystems, MEMS fabrication technologies, and microsystem packaging. Gary K. Fedder is Professor of Electrical and Computer Engineering, Professor of The Robotics Institute and the Director of the Institute for Complex Engineered Systems (ICES) at Carnegie Mellon University, Pittsburgh, USA. He received the BSc and MSc degrees in electrical engineering from MIT in 1982 and 1984, respectively, and his PhD in 1994 from the University of California, Berkeley. His research interests include microelectromechanical systems (MEMS) modeling, simulation and synthesis, integration of MEMS and CMOS, microsensor design, microactuator control systems, and probe–based nanofabrication technologies.