Surface and Thin Film Analysis: A Compendium of Principles, Instrumentation, and Applications

Surveying and comparing all techniques relevant for practical applications in surface and thin film analysis, this second edition of a bestseller is a vital guide to this hot topic in nano– and surface technology. This new book has been revised and updated and is divided into four parts – electron, ion, and photon detection, as well as scanning probe microscopy. New chapters have been added to cover such techniques as SNOM, FIM, atom probe (AP),and sum frequency generation (SFG). Appendices with a summary and comparison of techniques and a list of equipment suppliers make this book a rapid reference for materials scientists, analytical chemists, and those working in the biotechnological industry.
From a Review of the First Edition (edited by Bubert and Jenett)
"... a useful resource..."
Journal of the American Chemical Society

Spis treści:
Preface to the First Edition XVII
Preface to the Second Edition XIX
List of Contributors XXI
1 Introduction 1
John C. Rivière and Henning Bubert
Part One Electron Detection 7
2 X–Ray Photoelectron Spectroscopy (XPS) 9
Henning Bubert, John C. Rivière, and Wolfgang S.M. Werner
2.1 Principles 9
2.2 Instrumentation 12
2.3 Spectral Information and Chemical Shifts 19
2.4 Quantification, Depth Profiling, and Imaging 21
2.5 The Auger Parameter 27
2.6 Applications 28
2.7 Ultraviolet Photoelectron Spectroscopy (UPS) 38
References 39
3 Auger Electron Spectroscopy (AES) 43
Henning Bubert, John C. Rivière, and Wolfgang S.M. Werner
3.1 Principles 43
3.2 Instrumentation 44
3.3 Spectral Information 47
3.4 Quantification and Depth Profiling 51
3.5 Applications 54
3.6 Scanning Auger Microscopy (SAM) 61
Refer ences 64
4 Electron Energy–Loss Spectroscopy (EELS) and Energy–Filtering Transmission Electron Microscopy (EFTEM) 67
Reinhard Schneider
4.1 Principles 68
4.2 Instrumentation 70
4.3 Qualitative Spectral Information 72
4.4 Quantification 83
4.5 Imaging of Element Distribution 85
4.6 Summary 88
References 89
5 Low–Energy Electron Diffraction (LEED) 93
Georg Held
5.1 Principles and History 93
5.2 Instrumentation 94
5.3 Qualitative Information 96
5.4 Quantitative Structural Information 101
5.5 Low–Energy Electron Microscopy 106
References 108
6 Other Electron–Detecting Techniques 111
John C. Rivière
6.1 Ion (Excited) Auger Electron Spectroscopy (IAES) 111
6.2 Ion Neutralization Spectroscopy (INS) 111
6.3 Inelastic Electron Tunneling Spectroscopy (IETS) 112
Reference 113
Part Two Ion Detection 115
7 Static Secondary Ion Mass Spectrometry (SSIMS) 117
Heinrich F. Arlinghaus
7.1 Principles 117
7.2 Instrumentation 119
7.3 Quantification 123
7.4 Spectral Information 125
7.5 Applications 127
References 138
8 Dynamic Secondary Ion Mass Spectrometry (SIMS) 141
Herbert Hutter
8.1 Principles 141
8.2 Instrumentation 143
8.3 Spectral Information 146
8.4 Quantification 147
8.5 Mass Spectra 149
8.6 Depth Profiles 149
8.7 Imaging 152
8.8 Three–Dimensional (3–D)–SIMS 154
8.9 Applications 156
References 159
9 Electron–Impact (EI) Secondary Neutral Mass Spectrometry (SNMS) 161
Michael Kopnarski and Holger Jenett
9.1 Introduction 161
9.2 General Principl es of SNMS 162
9.3 Instrumentation and Methods 166
9.4 Spectral Information and Quantification 170
9.5 Element Depth Profiling 172
9.6 Applications 174
References 175
10 Laser Secondary Neutral Mass Spectrometry (Laser–SNMS) 179
Heinrich F. Arlinghaus
10.1 Principles 179
10.2 Instrumentation 182
10.3 Spectral Information 183
10.4 Quantification 183
10.5 Applications 184
References 189
11 Rutherford Backscattering Spectroscopy (RBS) 191
Leopold Palmetshofer
11.1 Introduction 191
11.2 Principles 191
11.3 Instrumentation 194
11.4 Spectral Information 194
11.5 Quantification 196
11.6 Figures of Merit 197
11.7 Applications 198
11.8 Related Techniques 201
References 201
12 Low–Energy Ion Scattering (LEIS) 203
Peter Bauer
12.1 Principles 203
12.2 Instrumentation 206
12.3 LEIS Information 208
12.4 Quantification 211
12.5 Applications of LEIS 211
References 214
13 Elastic Recoil Detection Analysis (ERDA) 217
Oswald Benka
13.1 Introduction 217
13.2 Fundamentals 218
13.3 Particle Identifi cation Methods 220
13.4 Equipment 222
13.5 Data Analysis 223
13.6 Sensitivity and Depth Resolution 223
13.7 Applications 224
References 226
14 Nuclear Reaction Analysis (NRA) 229
Oswald Benka
14.1 Introduction 229
14.2 Principles 231
14.3 Equipment and Depth Resolution 232
14.4 Applications 234
References 236
15 Field Ion Microscopy (FIM) and Atom Probe (AP) 237
Yuri Suchorski and Wolfgang Drachsel
15.1 Introduction 237
15.2 Principles and Instrumentation 2 39
15.3 Applications 248
References 257
16 Other Ion–Detecting Techniques 261
John C. Rivière
16.1 Desorption Methods 261
16.2 Glow–Discharge Mass Spectroscopy (GD–MS) 263
16.3 Fast–Atom Bombardment Mass Spectroscopy (FABMS) 263
References 264
Part Three Photon Detection 265
17 Total–Reflection X–Ray Fluorescence (TXRF) Analysis 267
Laszlo Fabry, Siegfried Pahlke, and Burkhard Beckhoff
17.1 Principles 267
17.2 Instrumentation 269
17.3 Spectral Information 275
17.4 Quantification 276
17.5 Applications 277
References 288
18 Energy–Dispersive X–Ray Spectroscopy (EDXS) 293
Reinhard Schneider
18.1 Principles 293
18.2 Practical Aspects of X–Ray Microanalysis and Instrumentation 295
18.3 Qualitative Spectral Information 303
18.4 Quantification 304
18.5 Imaging of Element Distribution 306
18.6 Summary 308
References 309
19 Grazing Incidence X–Ray Methods for Near–Surface Structural Studies 311
P. Neil Gibson
19.1 Principles 311
19.2 Experimental Techniques and Data Analysis 317
19.3 Applications 321
References 326
20 Glow Discharge Optical Emission Spectroscopy (GD–OES) 329
Volker Hoffmann and Alfred Quentmeier
20.1 Principles 329
20.2 Instrumentation 330
20.3 Spectral Information 335
20.4 Quantification 336
20.5 Depth Profiling 337
20.6 Applications 339
References 342
21 Surface Analysis by Laser Ablation 345
Roland Hergenröder and Michail Bolshov
21.1 Introduction 345
21.2 Instrumentation 346
21.3 Depth Profiling 348
21.4 Nea r–Field Ablation 354
21.5 Conclusion 354
References 355
22 Ion Beam Spectrochemical Analysis (IBSCA) 357
Volker Rupertus
22.1 Principles 357
22.2 Instrumentation 358
22.3 Spectral and Analytical Information 360
22.4 Quantitative Analysis by IBSCA 361
22.5 Applications 363
References 366
23 Reflection Absorption IR Spectroscopy (RAIRS) 367
Karsten Hinrichs
23.1 Instrumentation 367
23.2 Principles 368
23.3 Applications 369
23.4 Related Techniques 374
References 374
24 Surface Raman Spectroscopy 377
Wieland Hill and Bernhard Lendl
24.1 Principles 377
24.2 Surface–Enhanced Raman Scattering (SERS) 378
24.3 Instrumentation 380
24.4 Spectral Information 382
24.5 Quantification 383
24.6 Applications 383
24.7 Nonlinear Optical Spectroscopy 387
References 390
25 UV–VIS–IR Ellipsometry (ELL) 393
Bernd Gruska and Karsten Hinrichs
25.1 Principles 393
25.2 Instrumentation 395
25.3 Applications 398
References 405
26 Sum Frequency Generation (SFG) Spectroscopy 407
Günther Rupprechter and Athula Bandara
26.1 Introduction to SFG Spectroscopy 407
26.2 SFG Theory 410
26.3 SFG Instrumentation and Operation Modes 414
26.4 Applications of SFG Spectroscopy and Selected Case Studies 417
26.5 Conclusion 430
References 430
27 Other Photon–Detecting Techniques 437
John C. Rivière
27.1 Appearance Potential Methods 437
27.2 Inverse Photoemission Spectroscopy (IPES) and Bremsstrahlung Isochromat Spectroscopy (BIS) 437
Part Four Scanning Probe Microscopy 439
28 Introduction 441Gernot Friedbacher
References 442
29 Atomic Force Microscopy (AFM) 443
Gernot Friedbacher
29.1 Principles 443
29.2 Further Modes of AFM Operation 446
29.3 Instrumentation 452
29.4 Applications 455
References 462
30 Scanning Tunneling Microscopy (STM) 465
Gernot Friedbacher
30.1 Principles 465
30.2 Instrumentation 467
30.3 Lateral and Spectroscopic Information 468
30.4 Applications 470
References 479
31 Scanning Near–Field Optical Microscopy (SNOM) 481
Marc Richter and Volker Deckert
31.1 Introduction 481
31.2 Instrumentation and Operation 482
31.3 SNOM Applications 488
31.4 Outlook 493
References 493
Appendices 499
Appendix A Summary and Comparison of Techniques 501
Appendix B Surface and Thin–Film Analytical
Equipment Suppliers 507
Index 519

Nota biograficzna:
Gernot Friedbacher is Associate Professor of Analytical Chemistry at the Vienna University of Technology. His research activities are focused on investigation of surfaces and surface processes with scanning probe microscopy and electron probe x–ray microanalysis covering a broad field of applications ranging from basic research on thin film systems to materials science. Over the last decades he has held numerous theoretical and practical courses in the field of analytical chemistry with emphasis on intstrumental analysis and surface– and interface analysis. Prof. Friedbacher has published over 120 research articles, reviews, and book chapters.
Henning Bubert worked at the Institut fur Analytische Wissenschaften – ISAS – (Institute for Analytical Sciences) in Dortmund until his retirement in 2003. He is currently working as guest scientist. H is research activities are mainly focused on investigation of surfaces and thin films by electron spectroscopy related to the development and application of new materials in mechanical engineering. He has published over 110 research articles, reviews, and book chapters.

Okładka tylna:
Surveying and comparing all techniques relevant for practical applications in surface and thin film analysis, this second edition of a bestseller is a vital guide to this hot topic in nano– and surface technology. This new book has been revised and updated and is divided into four parts – electron, ion, and photon detection, as well as scanning probe microscopy. New chapters have been added to cover such techniques as SNOM, FIM, atom probe (AP),and sum frequency generation (SFG). Appendices with a summary and comparison of techniques and a list of equipment suppliers make this book a rapid reference for materials scientists, analytical chemists, and those working in the biotechnological industry.
From a Review of the First Edition (edited by Bubert and Jenett)
"... a useful resource..."
Journal of the American Chemical Society