Physics and Technology of Crystalline Oxide Semiconductor CAAC–IGZO: Fundamentals

Electronic devices using an oxide semiconductor are the focus of much attention, with crystalline materials generating huge commercial success. Transistors with one of oxide semiconductors, indium gallium zinc oxide (IGZO), have a higher mobility than amorphous silicon transistors, and an extremely low off–state current. The use of the crystalline oxide semiconductor CAAC–IGZO (c–axis aligned crystalline IGZO), one of Dr. Yamazaki′s own techniques, enables further scaling down, higher reliability, and process simplification of transistors, and is expected in displays and LSI devices. This original book introduces the CAAC–IGZO structure, and describes the physics and technology of this new class of oxide materials. It explains the crystallographic classification of crystalline oxide semiconductors, their crystallographic characteristics and physical properties, and how this unique material has made a major contribution to the field of oxide semiconductor thin films. A further two books in the series will describe the application using CAAC–IGZO in LCD and OLED displays; and LSI devices.

Key features:

Introduces a unique and revolutionary crystalline oxide semiconductor (c–axis aligned crystalline indium gallium zinc oxide, CAAC–IGZO), that is still as yet, relatively unknown.

Presents overviews of crystallography of indium gallium zinc oxide and related compounds. Offers an in–depth understanding of CAAC–IGZO.

Explains the fabrication method of CAAC–IGZO thin films.

Presents the physical properties and latest data to support high–reliability crystalline IGZO based on hands–on experience.

Describes the manufacturing process the CAAC–IGZO transistors and introduces the device application using CAAC–IGZO.