Semiconductor Materials and Process Technology Handbook

This handbook is a broad review of semiconductor materials and process technology, with emphasis on very large-scale integration (VLSI) and ultra large scale integration (ULSI). The technology of integrated circuit (IC) processing is expanding so rapidly that it can be difficult for the scientist working in one area to keep abreast of developments in other areas of the field. This handbook solves this problem by bringing together "snapshots" of the various aspects of the technology.

Introduction
Silicon Materials Technology
The Thermal Oxidation of Silicon and Other Semiconductor Materials
Chemical Vapor Deposition of Silicon and Its Compounds
Chemical Etching and Slice Cleanup of Silicon
Plasma Processing: Mechanisms and Applications
Physical Vapor Deposition
Diffusion and Ion Implantation in Silicon
Microlithography for VLSI
Metallization for VLSI Interconnect and Packaging
Characterization of Semiconductor Materials
References
Index