Micromechanics and MEMS: Classic and Seminal Papers to 1990

Electrical Engineering Micromechanics and MEMS Classic and Seminal Papers to 1990 Micromechanics is a rich, diverse field that draws on many different disciplines and has potential applications in medicine, consumer products, genetic engineering, aerospace and microsatellites, communication, the military, data storage, games and toys, food preparation, chemical processing, sensors, and microactuators. In fact, most fields will find uses for micromechanics in the next ten years. Micromechanics and MEMS gives you convenient access to the fundamental papers in this rapidly growing field. Until now, papers written during the earlier stages of this field have been difficult to retrieve. Micromechanics and MEMS presents seminal papers in micromechanics, up to and including papers written in 1990. This volume gives you an historical perspective of the field and insight into where the field is heading. The papers are arranged by topic, with an introduction to each section written by expert and editor, William Trimmer. Topics covered include:Side drive, comb drive, electrostatic, magnetic, and harmonic actuatorsValves and pumpsFluidicsSurface and bulk micromachiningLIGAComputer–aided designMetrology

Spis treści:
Acknowledgments and Dedication.
Introduction.
Comments on Writing an Article.
EARLY PAPERS IN MICROMECHANICS.
There′s Plenty of Room at the Bottom (R. Feynman).
Infinitesimal Machinery (R. Feynman).
The Resonant Gate Transistor (H. Nathanson, et al.).
Silicon Micromechanical Devices (J. Angell, et al.).
Anisotropic Etching of Silicon (K. Bean).
Silicon as a Mechanical Materials (K. Petersen).
Microrobots and Micromechanical Systems (W. Trimmer).
Small Machines, Large Opportunities (K. Gabriel, et al.).
SIDE DRIVE ACTUATORS.
IC–Processed Electrostatic Micro–Motors (L.–S. Fan, et al.).
IC 211;Processed Micro–Motors: Design, Technology, and Testing (Y.–C. Tai, et al.).
Surface–Micromachining Processes for Electrostatic Microactuator Fabrication (T. Lober and R. Howe).
A Study of Three Microfabricated Variable–Capacitance Motors (M. Mehregany, et al.).
Friction and Wear in Microfabricated Harmonic Side–Drive Motors (M. Mehregany, et al.).
Measurements of Electric Micromotor Dynamics (S. Bart, et al.).
COMB DRIVE ACTUATORS.
Laterally Driven Polysilicon Resonant Microstructures (W. Tang, et al.).
Electrostatic–Comb Drive of Lateral Polysilicon Resonators (W. Tang, et al.).
Electrostatically Balanced Comb Drive for Controlled Levitation (W. Tang, et al.).
Polysilicon Microgripper (C.–J. Kim, et al.).
ELECTROSTATIC ACTUATORS.
The Principle of an Electrostatic Linear Actuator Manufactured by Silicon Micromachining (H. Fujita and A. Omodaka).
Design Considerations for a Practical Electrostatic Micro–Motor (W. Trimmer and K. Gabriel).
SCOFSS: A Small Cantilevered Optical Fiber Servo System (J. Wood, et al.).
Microactuators for Aligning Optical Fibers (R. Jebens, et al.).
Large Displacement Linear Actuator (R. Brennen, et al.).
Multi–Layered Electrostatic Film Actuator (S. Egawa and T. Higuchi).
Movable Micromachined Silicon Plates With Integrated Position Sensing (M. Allen, et al.).
Micro Electro Static Actuator With Three Degrees of Freedom (T. Fukuda and T. Tanaka).
The Modelling of Electrostatic Forces in Small Electrostatic Actuators (R. Price. et al.).
Silicon Electrostatic Motors (W. Trimmer, et al.).
Electrostatic Actuators for Micromechatronics (H. Fujita and A. Omodaka).
Electric Micromotors: Electromechanical Characteristics (J. Lang, et al.).
Electroquasistatic Induction Micromotors (S. Bart and J. Lang)
A Perturbation M ethod for Calculating the Capacitance of Electrostatic Motors (S. Kumar and D. Cho)
MAGNETIC ACTUATORS.
Magnetically Levitated Micro–Machines (R. Pelrine and I. Busch–Vishniac).
Fabrication and Testing of a Micro Superconducting Actuator Using the Meissner Effect (Y.–K. Kim, et al.).
Room Temperature, Open–Loop Levitation of Microdevices Using Diamagnetic Materials (R. Pelrine).
HARMONIC MOTORS.
An Operational Harmonic Electrostatic Motor (W. Trimmer and R. Jebens).
The Wobble Motor: An Electrostatic Planetary–Armature, Microactuator (S. Jacobsen, et al.).
An Electrostatic Top Motor and Its Characteristics (M. Sakata, et al.).
Operation of Microfabricated Harmonic and Ordinary Side–Drive Motors (M. Mehregany, et al.).
OTHER ACTUATORS.
Thermal.
Micromechanical Silicon Actuators Based on Thermal Expansion Effects (W. Riethmüller, et al.).
CMOS Electrothermal Microactuators (M. Parameswaran, et al.).
Electrically–Activated, Micromachined Diaphragm Valves (H. Jerman).
Study on Micro Engines—Miniaturizing Stirling Engines for Actuators and Heatpumps (N. Nakajima, et al.).
Shape Memory Alloy.
A Micro Rotary Actuator Using Shape Memory Alloys (K. Gabriel, et al.).
Millimeter Size Joint Actuator Using Shape Memory Alloy (K. Kuribayashi).
Reversible SMA Actuator for Micron Sized Robot (K. Kuribayashi & M. Yoshitake).
Characteristics of Thin–Wire Shape Memory Actuators (P. Neukomm, et al.).
Shape Memory Alloy Microactuators (M. Bergamasco, et al.).
Impact,
Micro Actuators Using Recoil of an Ejected Mass (T. Higuchi, et al.).
Precise Positioning Mechanism Utilizing Rapid Deformations of Piezoelectric Elements (T. Higuchi, et al.).
Tiny Silent Linear Cybernetic Actuator Driven by Piezoelectric Device With Electromagnetic Clamp (K. Iku ta, et al.).
Experimental Model and IC–Process Design of a Nanometer Linear Piezoelectric Stepper Motor (J. Judy, et al.).
Piezoelectric.
Zinc–Oxide Thin Films for Integrated–Sensor Applications (D. Polla & R. Muller).
A Micromachined Manipulator for Submicron Positioning of Optical Fibers (A. Feury, et al.).
Ultrasonic Micromotors: Physics and Applications (R. Moroney, et al.).
VALVES AND PUMPS.
A Microminiature Electric–to–Fluidic Valve (M. Zdeblick & J. Angell).
The Fabrication of Integrated Mass Flow Controllers (M. Esashi, et al.).
Normally Close Microvalve and Micropump Fabricated on a Silicon Wafer (M. Esashi, et al.).
A Thermopneumatic Micropump Based on Micro–Engineering Techniques (F. Van de Pol, et al.).
Variable–Flow Micro–Valve Structure Fabricated with Silicon Fusion Bonding (F. Pourahmadi, et al.).
A Pressure–Balanced Electrostatically–Actuated Microvalve (M. Huff, et al.).
Micromachined Silicon Microvalve (T. Ohnstein, et al.).
FLUIDICS.
Microminiature Fluidic Amplifier (M. Zdeblick, et al.).
A Planar Air Levitated Electrostatic Actuator System (K. Pister, et al.).
Liquid and Gas Transport in Small Channels (J. Pfahler, et al.).
Squeeze–Film Damping in Solid–State Accelerometers (J. Starr).
A Micromachined Floating–Element Shear Sensor (M. Schmidt, et al.).
A Multi–Element Monolithic Mass Flowmeter with On–Chip CMOS Readout Electronics (E. Yoon & K. Wise).
Environmentally Rugged, Wide Dynamic Range Microstructure Airflow Sensor (T. Ohnstein, et al.).
SURFACE MICROMACHINING.
Polycrystalline Silicon Micromechanical Beams (R. Howe & R. Muller).
Integrate Fabrication of Polysilicon Mechanisms (M. Mehregany, et al.).
Integrated Movable MicroMechanical Structur