Advanced RF MEMS

An up-to-date guide to the theory and applications of RF MEMS. With detailed information about RF MEMS technology as well as its reliability and applications, this is a comprehensive resource for professionals, researchers, and students alike. • Reviews RF MEMS technologies • Illustrates new techniques that solve long-standing problems associated with reliability and packaging • Provides the information needed to incorporate RF MEMS into commercial products • Describes current and future trends in RF MEMS, providing perspective on industry growth • Ideal for those studying or working in RF and microwave circuits, systems, microfabrication and manufacturing, production management and metrology, and performance evaluation

Spis treści:
1. Introduction S. Lucyszyn
2. Electromechanical modelling of electrostatic actuators D. Elata and V. Leus
3. Switches and their fabrication technologies T. Lisec
4. Niche switch technologies S. Lucyszyn, S. Pranonsatit, J. Y. Choi and A. Holmes
5. Reliability I. De Wolf
6. Dielectric charging G. Papaioannou
7. Stress and thermal characterisation R. Y. Fillit and R. Fortunier
8. High power handling F. Coccetti and R. Plana
9. Packaging H. Tilmans, A. Jourdain and P. De Moor
10. Impedance tuners and tuneable filters A. Pothier and T. Vähä-Heikkilä
11. Phase shifters and tunable delay lines L. Dussopt
12. Reconfigurable architectures T. Vähä-Heikkilä
13. Industry roadmap for RF MEMS J. Bouchaud, R. Sorrentino, B. Knoblich, H. Tilmans and F. Coccetti.