Analysis of Microelectronic Materials and Devices

This book presents, for the first time, a comprehensive survey of analytical techniques currently used in support of all stages of microelectronic materials and device processing. The diversity of topics covered in this book has been achieved by bringing together an international field of authors contributing specialized individual chapters. This has ensured that each technique is discussed in detail giving in–depth treatments of the subject matter. A particularly helpful feature in this book is the concise technical summary given at the end of each section. Four major areas are considered in this volume:Bulk analysis of microelectronic materials
Analysis of surfaces, interfaces and thin films
Structure analysis on an atomic scale
Characterization of physical, electrical and topographic features Complete with over 400 illustrations, this volume is an indispensible guide to analytical support for the microelectronic industry.

Spis treści:
Bulk Analysis of Microelectronic Materials.
Analysis of Surfaces, Interfaces and Thin Films.
Structure Analysis on an Atomic Scale.
Physical, Electrical and Geometrical Characterization.
Index.

Okładka tylna:
This book presents, for the first time, a comprehensive survey of analytical techniques currently used in support of all stages of microelectronic materials and device processing. The diversity of topics covered in this book has been achieved by bringing together an international field of authors contributing specialized individual chapters. This has ensured that each technique is discussed in detail giving in–depth treatments of the subject matter. A particularly helpful feature in this book is the concise technical summary given at the end of each section. Four major areas are considered in this volume:Bulk analysis of microelectronic materials
Analysis of surfaces, interfaces and thin films
Structure a nalysis on an atomic scale
Characterization of physical, electrical and topographic features Complete with over 400 illustrations, this volume is an indispensible guide to analytical support for the microelectronic industry.