Introduction to Microfabrication

Successful textbook restructured and updated to include more real life applications and coverage on recent developments in the field of microfabrication.
The first edition published in 2004 and has proved to be both a valuable textbook and a handy desk reference. This new edition continues to provide students with an accessible guide to an important field. Fully updated, it has 5 new chapters to incorporate the recent developments in the field. CMOS–MEMS integration, Moore′s law and scaling trends sections have been updated with the latest in CMOS generation findings. Surface micromachining has been given a whole chapter, as have the topics of polymer microprocessing and glass microprocessing.
Solutions to all problems are held on a complementary website