Surface Metrology for Micro- and Nanofabrication

Surface Metrology for Micro- and Nanofabrication presents state-of-the-art measurement technologies for surface metrology in fabrication of micro- and nanodevices or components. This includes the newest general-purpose scanning probe microscopes, and both contact and non-contact surface profilers. In addition, the book outlines characterization and calibration techniques, as well as in-situ, on-machine, and in-process measurements for micro- and nanofabrication.

Provides materials scientists and engineers with an informed overview of the state-of-the-art in surface metrology Helps readers select and design the optimized surface metrology systems and carry out proper surface metrology practices in the fabrication of micro/nano-devices and componentsAssesses the best techniques for repairing micro-defects

1. Noncontact Scanning Electrostatic Force Microscope 2. Quartz Tuning Fork Atomic Force Microscope 3. Micropipette Ball Probing System 4. Low-Force Elastic Beam Surface Profiler 5. Linear-Scan Micro Roundness Measuring Machine 6. Micro-Gear Measuring Machine 7. On-Machine Length Gauge Surface Profiler 8. On-Machine Air-Bearing Surface Profiler 9. On-Machine Atomic Force Microscope 10. On-Machine Roll Profiler 11. In-Process Fast Tool Servo Profiler 12. Self-Calibration of Prove Tip Radius and Cutting Edge Sharpness