Laser Microfabrication: Thin Film Processes and Lithography

This book reviews the solid core of fundamental scientific knowledge on laser-stimulated surface chemistry that has accumulated over the past few years. It provides a useful overview for the student and interested non-expert as well as essential reference data (photodissociation cross sections, thermochemical constants, etc.) for the active researcher.

Technology. Y.S. Liu, Sources, Optics, and Laser Microfabrication Systems for Direct Writing and Projection Lithography. Fundamentals. T.J. Chuang, Laser-Stimulated Molecular Processes on Surfaces. M. Rothschild, Spectroscopy and Photochemistry of Gases, Adsorbates, and Liquids. C.I.H. Ashby and J.Y. Tsao, Photophysics and Thermophysics of Light Absorption and Energy Transport in Solids. H.J. Zeiger, D.J. Ehrlich, and J.Y. Tsao, Transport and Kinetics. Reactions. J.J. Ritsko, Laser Etching. R.L. Jackson, T.H. Baum, T.T. Kodas, D.J. Ehrlich, and P.B. Comita, Laser Deposition: Energetics and Chemical Kinetics. J. Haigh and M.R. Aylett, Laser Deposition: Experimental Approaches. S.J.C. Irvine, Epitaxy. I.W. Boyd, Doping and Oxidation. Index.