Smart Sensors and MEMS: Intelligent Sensing Devices and Microsystems for Industrial Applications

Smart Sensors and MEMS: Intelligent Devices and Microsystems for Industrial Applications, Second Edition highlights new, important developments in the field, including the latest on magnetic sensors, temperature sensors and microreaction chambers. The book outlines the industrial applications for smart sensors, covering direct interface circuits for sensors, capacitive sensors for displacement measurement in the sub-nanometer range, integrated inductive displacement sensors for harsh industrial environments, advanced silicon radiation detectors in the vacuum ultraviolet (VUV) and extreme ultraviolet (EUV) spectral range, among other topics. New sections include discussions on magnetic and temperature sensors and the industrial applications of smart micro-electro-mechanical systems (MEMS).

The book is an invaluable reference for academics, materials scientists and electrical engineers working in the microelectronics, sensors and micromechanics industry. In addition, engineers looking for industrial sensing, monitoring and automation solutions will find this a comprehensive source of information.

Contains new chapters that address key applications, such as magnetic sensors, microreaction chambers and temperature sensorsProvides an in-depth information on a wide array of industrial applications for smart sensors and smart MEMSPresents the only book to discuss both smart sensors and MEMS for industrial applications

1. What makes sensor devices and microsystems 'intelligent' or 'smart'? 2. Interfacing sensors to microcontrollers: a direct approach 3. Temperature Sensors 4. Capacitive sensors for displacement measurement in the sub-nanometer range 5. Integrated inductive displacement sensors for harsh industrial environments 6. Magnetic Sensors 7. Advanced silicon radiation detectors in the vacuum ultraviolet (VUV) and the extreme ultraviolet (EUV) spectral range 8. Integrated polarization analyzing CMOS image sensors for detection and signal processing 9. Advanced interfaces for resistive sensors 10. Reconfigurable ultrasonic smart sensor platform for nondestructive evaluation and imaging applications 11. Advanced optical incremental sensors: encoders and interferometers 12. Microfabrication technologies used for creating smart devices for industrial applications 13. Microactuators: design and technology 14. Microreaction Chambers 15. Dynamic behavior of smart MEMS in industrial applications 16. MEMS integrating motion and displacement sensors 17. MEMS print heads for industrial printing 18. Photovoltaic and fuel cells in power MEMS for smart energy management 19. Radio frequency (RF)-MEMS for smart communication microsystems 20. Smart acoustic sensor array (SASA) system for real-time sound processing applications