Developments in Surface Contamination and Cleaning: Methods for Surface Cleaning: Volume 9

Developments in Surface Contamination and Cleaning: Methods for Surface Cleaning, Volume 9, part of the Developments in Surface Contamination and Cleaning series provide a state-of-the-art guide to the current knowledge on the behavior of film-type and particulate surface contaminants and their associated cleaning methods.

This newest volume in the series discusses methods of surface cleaning of contaminants and the resources that are needed to deal with them. Taken as a whole, the series forms a unique reference for professionals and academics working in the area of surface contamination and cleaning. A strong theme running through the series is that of surface contamination and cleaning at the micro and nano scales.

Provides a comprehensive coverage of innovations in surface cleaning Written by established experts in the surface cleaning field, presenting an authoritative resourceContains a comprehensive review of the state-of-the-art, including case studies to enhance the learning process

Chapter 1. Nonaqueous Cleaning Challenges for Preventing Damage to Fragile Nanostructures

Chapter 2. Gas-Phase Cleaning for Removal of Surface Contaminants

Chapter 3. Laser-Induced Spray Jet Cleaning

Chapter 4. Brush Scrubbing for Post-CMP Cleaning

Chapter 5. Contamination Removal From UV and EUV Photomasks

Chapter 6. Aqueous Displacement of Water-Immiscible Cleaning Solvents: Cleaning Enhancement Using Ultrasonics